Computational lithography / Xu Ma and Gonzalo R. Arce
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| | | | Computational lithography. - Hoboken, NJ , 2010. | xv, 226 p. : ill. ; 25 cm Wiley series in pure and applied optics. | ISBN 9780470596975 (cloth) | .-ISBN 047059697X (cloth). | | 1. Microlithography - Mathematics 2. Integrated circuits - Design and construction - Mathematics 3. Photolithography - Mathematics 4. Semiconductors - Etching - Mathematics 5. Resolution (Optics).I. Arce, Gonzalo R. II. Title III. Series | | Library : UiTM Shah Alam |
| Accn No. | Item Status | Add Id | Location | SMD | Item Category | 903342 | Shelf | | PERPUSTAKAAN KEJURUTERAAN TAR(P3) | BOOK | RAK TERBUKA (OPEN SHELVES) |
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