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Computational lithography / Xu Ma and Gonzalo R. Arce

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  • MARC

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    TK7872.M3
    M3 2010
     
    903342 (Shelf),BOK
    Ma, Xu , 1983-

         Computational lithography. - Hoboken, NJ , 2010.

         xv, 226 p. : ill. ; 25 cm Wiley series in pure and applied optics.

         ISBN 9780470596975 (cloth)
         .-ISBN 047059697X (cloth).
         
         1. Microlithography - Mathematics 2. Integrated circuits - Design and construction - Mathematics 3. Photolithography - Mathematics 4. Semiconductors - Etching - Mathematics 5. Resolution (Optics).I. Arce, Gonzalo R. II. Title III. Series
         Library : UiTM Shah Alam
    Accn No.Item StatusAdd IdLocationSMDItem Category
    903342ShelfPERPUSTAKAAN KEJURUTERAAN TAR(P3)BOOKRAK TERBUKA (OPEN SHELVES)

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