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MEMS and microsystems : design, manufacture, and nanoscale engineering / Tai-Ran Hsu

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    TK7874
    .H794 2008
     
    879353 (Shelf),BOK
    Hsu, Tai-Ran

         MEMS and microsystems : design, manufacture, and nanoscale engineering. - Hoboken, NJ , 2008.

         xxv, 550 p. : ill. ; 25 cm.

         ISBN 9780470083017 (cloth)
         .-ISBN 0470083018 (cloth).
         
         1. Microelectronics 2. Microelectronic packaging 3. Microelectromechanical systems.I. Title
         Library : UiTM Shah Alam; UITM Pulau Pinang; UITM Terengganu
    Accn No.Item StatusAdd IdLocationSMDItem Category
    879353ShelfPERPUSTAKAAN KEJURUTERAAN TAR(P3)BOOKRAK TERBUKA (OPEN SHELVES)

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