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Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices / Ungyu Paik, Jea-Gun Park

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    TK7874.84
    .P35 2009
     
    877109 (Shelf),BOK
    Paik, Ungyu

         Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices. - Boca Raton, FL , 2009.

         xiii, 191 p., [14] p. of plates : ill. (some col.) ; 25 cm.

         ISBN 9781420059113 (hardcover : alk. paper)
         .-ISBN 1420059114 (hardcover : alk. paper).
         
         1. Nanoparticles 2. Nanoelectronics 3. Chemical mechanical planarization.I. Park, Jea-Gun II. Title
         Library : UiTM Shah Alam
    Accn No.Item StatusAdd IdLocationSMDItem Category
    877109ShelfPERPUSTAKAAN KEJURUTERAAN TAR(P3)BOOKRAK TERBUKA (OPEN SHELVES)

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