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Microelectronic applications of chemical mechanical planarization / edited by Yuzhuo Li

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  • MARC

  •  
    TK7874
    .M4675 2008
     
    815217 (Shelf),BOK
    Microelectronic applications of chemical mechanical planarization. - Hoboken, NJ , 2008.

         xxv, 734 p. : ill. ; 25 cm.

         ISBN 9780471719199
         .-ISBN 0471719196.
         
         1. Integrated circuits - Design and construction 2. Chemical mechanical planarization - Design and construction 3. Microelectronics - Materials.I. Li, Yuzhuo II. Title
         Library : UiTM Shah Alam; UITM Perlis
    Accn No.Item StatusAdd IdLocationSMDItem Category
    815217ShelfPERPUSTAKAAN KEJURUTERAAN TAR(P3)BOOKRAK TERBUKA (OPEN SHELVES)
    828927ShelfPERPUSTAKAAN KEJURUTERAAN TAR(P3)BOOKRAK TERBUKA (OPEN SHELVES)

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