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X-ray metrology in semiconductor manufacturing / D. Keith Bowen, Brian K. Tanner

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  • MARC

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    TK7874.58
    .B69 2006
     
    650858 (Shelf),BOK
    Bowen, D. Keit , 1940-

         X-ray metrology in semiconductor manufacturing. - Boca Raton , 2006.

         279 p. : ill. ; 25 cm.

         ISBN 0849339286 (alk. paper).
         
         1. Semiconductors - Design and construction - Quality control 2. Integrated circuits - Measurement 3. Semiconductor wafers - Inspection 4. Fluroscopy 5. X-rays - Diffraction.I. Tanner, B. K. II. Title
         Library : UiTM Shah Alam
    Accn No.Item StatusAdd IdLocationSMDItem Category
    650858ShelfPERPUSTAKAAN KEJURUTERAAN TAR(P3)BOOKRAK TERBUKA (OPEN SHELVES)

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