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Scientific wet process technology for innovative LSI/FPD manufacturing / edited by Tadahiro Ohmi

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  • MARC

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    TK7871.85
    .S3965 2006
     
    650854 (Shelf),BOK
    Scientific wet process technology for innovative LSI/FPD manufacturing. - Boca Raton, FL , 2006.

         386 p. : ill. ; 27 cm.

         ISBN 0849335434 (alk. paper).
         
         1. Semiconductors - Cleaning 2. Integrated circuits - Design and construction 3. Semiconductors - Design and construction.I. Ohmi, Tadahiro,1939- II. Title
         Library : UiTM Shah Alam
    Accn No.Item StatusAdd IdLocationSMDItem Category
    650854ShelfPERPUSTAKAAN KEJURUTERAAN TAR(P3)BOOKRAK TERBUKA (OPEN SHELVES)

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