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MEMS and NEMS : systems, devices, and structures / Sergey Edward Lyshevski

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  • MARC

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    TK7875
    .L9597 2002
     
    638835 (Shelf),BOK
    Lyshevski, Sergey Edward

         MEMS and NEMS : systems, devices, and structures. - Boca Raton, Fla. , 2002.

         461 p. : ill. ; 25 cm Nano- and microscience, engineering, technology, and medicine series.

         ISBN 0849312620 (alk. paper).
         
         1. Microelectromechanical systems.I. Title II. Series
         Library : UiTM Shah Alam
    Accn No.Item StatusAdd IdLocationSMDItem Category
    638835ShelfPERPUSTAKAAN KEJURUTERAAN TAR(P3)BOOKRAK TERBUKA (OPEN SHELVES)

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