Plasma techniques for film deposition / Mitsuharu Konuma
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| | | Konuma, Mitsuharu , 1950- |
| Plasma techniques for film deposition. - Harrow, UK. , 2005. | ix, 337 p. : ill. ; 25 cm. | ISBN 184265151X. | | 1. Plasma-enhanced chemical vapor deposition 2. Thin films.I. Title | | Library : UiTM Shah Alam; UITM Pulau Pinang |
| Accn No. | Item Status | Add Id | Location | SMD | Item Category | 614200 | Shelf | | PERPUSTAKAAN KEJURUTERAAN TAR(P3) | BOOK | RAK TERBUKA (OPEN SHELVES) | 655897 | Shelf | | PERPUSTAKAAN TUN ABDUL RAZAK(P1) | BOOK | RAK TERBUKA (OPEN SHELVES) | 655913 | Shelf | | PERPUSTAKAAN TUN ABDUL RAZAK(P1) | BOOK | RAK TERBUKA (OPEN SHELVES) | 655914 | Shelf | | PERPUSTAKAAN TUN ABDUL RAZAK(P1) | BOOK | RAK TERBUKA (OPEN SHELVES) | 655915 | Shelf | | PERPUSTAKAAN TUN ABDUL RAZAK(P1) | BOOK | RAK TERBUKA (OPEN SHELVES) | 655916 | Shelf | | PERPUSTAKAAN TUN ABDUL RAZAK(P1) | BOOK | RAK TERBUKA (OPEN SHELVES) |
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