Mechanical microsensors / M. Elwenspoek, R.J. Wiergerink
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| | | | Mechanical microsensors. - Berlin. - New York , 2001. | x, 295 p. : ill. ; 25 cm Microtechnology and MEMS. | ISBN 3540675825 (alk. paper). | | 1. Transducers 2. Silicon - Design and construction 3. Detectors - Design and construction 4. Microelectromechanical systems - Design and construction 5. Micromachining.I. Wiegerink, Remco J.,1964- II. Title III. Series | http://ptarpp2.uitm.edu.my/ptarpprack/RAK-16.gif | | Library : UiTM Shah Alam; UITM Pulau Pinang |
| Accn No. | Item Status | Add Id | Location | SMD | Item Category | 591673 | Shelf | | PERPUSTAKAAN KEJURUTERAAN TAR(P3) | BOOK | RAK TERBUKA (OPEN SHELVES) |
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