Introduction to microfabrication / Sami Franssila
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| | | | Introduction to microfabrication. - Chichester, West Sussex, England. - Hoboken, NJ , 2004. | xvii, 401 p. : ill. ; 26 cm. | ISBN 0470851058 (cloth) | .-ISBN 0470851066 (pbk.). | | 1. Microelectromechanical systems 2. Electronic apparatus and appliances 3. Microfabrication.I. Title | | Library : UiTM Shah Alam; UITM Pulau Pinang |
| Accn No. | Item Status | Add Id | Location | SMD | Item Category | 585791 | Shelf | | PERPUSTAKAAN KEJURUTERAAN TAR(P3) | BOOK | RAK TERBUKA (OPEN SHELVES) | 617493 | Shelf | | PERPUSTAKAAN TUN ABDUL RAZAK(P1) | BOOK | RAK TERBUKA (OPEN SHELVES) |
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