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Silicon nitride for microelectronic applications / [by] John T. Milek

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  • MARC

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    TK7871.15.S558
    M55 1971
     
    56196 (Shelf),BOK
    Milek, John T.

         Silicon nitride for microelectronic applications. - New York , 1971-72.

         2 v 118p. . : illus. ; 28 cm Handbook of electronic materials, v. 3, 6.
         pt. 1. Preparation and properties.--pt. 2. Applications and devices.

         ISBN 0306671034.
         
         1. Microelectronics - Materials 2. Silicon nitride.I. Title II. Series
         Library : UiTM Shah Alam
    Accn No.Item StatusAdd IdLocationSMDItem Category
    56196ShelfPERPUSTAKAAN TUN ABDUL RAZAK(P1)BOOKret

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