Shah Alam

  • UiTM Shah Alam
  • UITM Sarawak
  • UITM Perlis
  • UITM Pulau Pinang
  • UITM Sabah
  • UiTM Negeri Sembilan
  • UiTM Johor
  • UITM Melaka
  • UITM Pahang
  • UITM Kelantan
  • UITM Kedah
  • UITM Perak
  • UITM Terengganu
  • UiTM Libraries
.

Particle control for semiconductor manufacturing / [edited by] R.P. Donovan

  • Linear

  • MARC

  •  
    TK7871.85
    P37
     
    19134MU (Shelf),BOK
    Particle control for semiconductor manufacturing. - New York , 1990.

         xiii, 464 p. : ill. ; 26 cm.
         Updated revision of the course notes distributed at a short course held on Apr. 19-21, 1988, in Research Triangle Park, N.C
         .Includes bibliographical references.

         ISBN 0824782429.
         
         1. Semiconductors - Defects 2. Particles 3. Semiconductors.I. Donovan, R. P II. Title
         Library : UiTM Shah Alam
    Accn No.Item StatusAdd IdLocationSMDItem Category
    19134MUShelfPERPUSTAKAAN INTEC(S17)BOOKRAK TERBUKA (OPEN SHELVES)

Search In

Shelf Browse

No Shelf Browse Data.

Top