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Materials modification by energetic atoms and ions : Symposium held April 28-30, 1992, San Francisco, California, USA / editors, Kenneth S. Grabowski ... [et al.]

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    TK7871.85
    .M3687 1992
     
    372934 (Shelf),BOK
    Materials Research Society

         Materials modification by energetic atoms and ions : Symposium held April 28-30, 1992, San Francisco, California, USA. - Pitsburgh, PA , 1992.

         xiii, 405 p. : ill. ; 24 cm.

         ISBN 1558991638.
         
         1. Plasma etching - Congresses 2. Semiconductors - Etching - Congresses 3. Ion bombardment - Congresses.I. Grabowski, Kenneth S II. Title
         Library : UiTM Shah Alam
    Accn No.Item StatusAdd IdLocationSMDItem Category
    372934ShelfPERPUSTAKAAN KEJURUTERAAN TAR(P3)BOOKret

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