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Plasma deposition of amorphous silicon-based materials / edited by Giovanni Bruno, Pio Capezzuto, Arun Madan

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  • MARC

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    TK7871.99.A45
    P55 1995
     
    439617 (Shelf),BOK
    Plasma deposition of amorphous silicon-based materials. - Boston , 1995.

         xi, 324 p. : ill. ; 24 cm Plasma--materials interactions.

         ISBN 012137940X.
         
         1. Amorphous semiconductors - Design and construction 2. Silicon alloys 3. Plasma-enhanced chemical vapor deposition.I. Bruno, Giovanni II. Capezzuto, Pio III. Madan, A. IV. Title V. Series
         Library : UiTM Shah Alam
    Accn No.Item StatusAdd IdLocationSMDItem Category
    439617ShelfPERPUSTAKAAN KEJURUTERAAN TAR(P3)BOOKret

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