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Microlithography : process technology for IC fabrication / David J. Elliott

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  • MARC

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    TK7874
    .E495 1986
     
    310092 (Shelf),BOK
    Elliott, David J

         Microlithography : process technology for IC fabrication. - New York , 1986.

         xix, 378 p. : ill. ; 24 cm.

         ISBN 0070193045.
         
         1. Microlithography 2. Photoresists 3. Integrated circuits - Very large scale integration - Design and construction.I. Title
         Library : UiTM Shah Alam
    Accn No.Item StatusAdd IdLocationSMDItem Category
    310092ShelfPERPUSTAKAAN KEJURUTERAAN TAR(P3)BOOKret
    310181WithdrawnPERPUSTAKAAN KEJURUTERAAN TAR(P3)BOOKRAK TERBUKA (OPEN SHELVES)
    310182WithdrawnPERPUSTAKAAN KEJURUTERAAN TAR(P3)BOOKRAK TERBUKA (OPEN SHELVES)

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